Thermomechanical response of bare and Al2O3-nanocoated Au/Si bilayer beams for microelectromechanical systems Journal Article uri icon

Overview

publication date

  • July 1, 2003

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:44 PM

Full Author List

  • Gall K; Hulse M; Dunn ML; Finch D; George SM; Corff BA

author count

  • 6

citation count

  • 11

Other Profiles

International Standard Serial Number (ISSN)

  • 0884-2914

Additional Document Info

start page

  • 1575

end page

  • 1587

volume

  • 18

issue

  • 7