Thermomechanical response of bare and Al2O3-nanocoated Au/Si bilayer beams for microelectromechanical systems Journal Article uri icon

Overview

publication date

  • July 1, 2003

Full Author List

  • Gall K; Hulse M; Dunn ML; Finch D; George SM; Corff BA

Other Profiles

Additional Document Info

start page

  • 1575

end page

  • 1587

volume

  • 18

issue

  • 7