DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 18, 2015

Full Author List

Giner J; Gray JM; Gertsch J; Bright VM; Shkel AM

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Additional Document Info

start page

805

end page

808