DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING
Conference Proceeding
Overview
publication date
- January 18, 2015
Full Author List
- Giner J; Gray JM; Gertsch J; Bright VM; Shkel AM
published in
Additional Document Info
start page
- 805
end page
- 808