DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING Conference Proceeding uri icon

Overview

publication date

  • January 18, 2015

Full Author List

  • Giner J; Gray JM; Gertsch J; Bright VM; Shkel AM

Additional Document Info

start page

  • 805

end page

  • 808