publication venue for
- ELECTROWETTING-BASED TUNABLE LIQUID DROPLET MICRORESONATOR 2021
- DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING 2015
- THERMALLY ACTUATED I-SHAPED ELECTROMECHANICAL VHF RESONATORS 2012
- WAFER-LEVEL PROCESSING FOR POLYMER-BASED PLANAR MICRO CRYOGENIC COOLERS 2012
- MEMS-ENABLED MECHANICALLY-TUNABLE 2D PHOTONIC CRYSTAL LENS 2011
- ALD-Enabled Hermetic Sealing for Polymer-Based Wafer Level Packaging of MEMS 2010
- ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NANOELECTROMECHANICAL TRANSISTORS 2010
- THERMAL MANAGEMENT OF VERTICAL GALLIUM NITRIDE NANOWIRE ARRAYS: COOLING DESIGN AND TIP TEMPERATURE MEASUREMENT 2010
- ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NEMS DEVICES VIA A NOVEL TOP-DOWN APPROACH 2009
- TENSILE MEASUREMENT OF A SINGLE CRYSTAL GALLIUM NITRIDE NANOWIRE 2009
- Atomic layer deposited alumina for micromachined resonators 2008
- Microfabricated atomic clocks 2005
- Rapid manufacturing of embedded microchannels from a single layered SU-8, and determining the dependence of SU-8 Young's modulus on exposure dose with a laser acoustic technique 2005
- Force-deflection characterization of individual carbon nanotubes attached to MEMS devices 2004
- Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors 2004
- Micromachined alkali atom vapor cells for chip-scale atomic clocks 2004
- Ultra-thin multilayer nanomembranes for short wavelength deformable optics 2004
- A solder self-assembled torsional micromirror array 2003
- Atom optics on a chip 2003
- A solder self-assembled large angular displacement torsional electrostatic micromirror 2002
- An integrated micro-optical system for laser-to-fiber active alignment 2002
- Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices 2002
- Development of SiCN ceramic thermal actuators 2002
- Digitally positioned micromirror for open-loop controlled applications 2002
- Fabrication process for ultra high aspect ratio polysilazane-derived MEMS 2002
- Fabrication of SiCN MEMS structures using microforged molds 2001
- Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor 2001
- Flip-chip fabrication of advanced micromirror arrays 2001
- Solder self-assembled micro axial flow fan driven by a scratch drive actuator rotary motor 2001
- Flip-chip assembly for Si-based RF MEMS 1999
- Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles 1999