publication venue for

• ELECTROWETTING-BASED TUNABLE LIQUID DROPLET MICRORESONATOR 2021
• DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROMACHINED GLASS-BLOWN SPHERICAL RESONATOR WITH IN-SITU INTEGRATED SILICON ELECTRODES AND ALD TUNGSTEN INTERIOR COATING 2015
• THERMALLY ACTUATED I-SHAPED ELECTROMECHANICAL VHF RESONATORS 2012
• WAFER-LEVEL PROCESSING FOR POLYMER-BASED PLANAR MICRO CRYOGENIC COOLERS 2012
• MEMS-ENABLED MECHANICALLY-TUNABLE 2D PHOTONIC CRYSTAL LENS 2011
ALD-Enabled Hermetic Sealing for Polymer-Based Wafer Level Packaging of MEMS 2010
ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NANOELECTROMECHANICAL TRANSISTORS 2010
THERMAL MANAGEMENT OF VERTICAL GALLIUM NITRIDE NANOWIRE ARRAYS: COOLING DESIGN AND TIP TEMPERATURE MEASUREMENT 2010
ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NEMS DEVICES VIA A NOVEL TOP-DOWN APPROACH 2009
TENSILE MEASUREMENT OF A SINGLE CRYSTAL GALLIUM NITRIDE NANOWIRE 2009
Atomic layer deposited alumina for micromachined resonators 2008
Microfabricated atomic clocks 2005
Rapid manufacturing of embedded microchannels from a single layered SU-8, and determining the dependence of SU-8 Young's modulus on exposure dose with a laser acoustic technique 2005
Force-deflection characterization of individual carbon nanotubes attached to MEMS devices 2004
Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors 2004
Micromachined alkali atom vapor cells for chip-scale atomic clocks 2004
Ultra-thin multilayer nanomembranes for short wavelength deformable optics 2004
A solder self-assembled torsional micromirror array 2003
Atom optics on a chip 2003
A solder self-assembled large angular displacement torsional electrostatic micromirror 2002
An integrated micro-optical system for laser-to-fiber active alignment 2002
Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices 2002
Development of SiCN ceramic thermal actuators 2002
Digitally positioned micromirror for open-loop controlled applications 2002
Fabrication process for ultra high aspect ratio polysilazane-derived MEMS 2002
Fabrication of SiCN MEMS structures using microforged molds 2001
Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor 2001
Flip-chip fabrication of advanced micromirror arrays 2001
Solder self-assembled micro axial flow fan driven by a scratch drive actuator rotary motor 2001
Flip-chip assembly for Si-based RF MEMS 1999
Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles 1999
... more