Atomic Layer Deposition of Metal Fluorides Using HF-Pyridine as the Fluorine Precursor Journal Article uri icon

Overview

publication date

  • April 12, 2016

Full Author List

  • Lee Y; Sun H; Young MJ; George SM

Other Profiles

Additional Document Info

start page

  • 2022

end page

  • 2032

volume

  • 28

issue

  • 7