Atomic Layer Deposition of Metal Fluorides Using HF-Pyridine as the Fluorine Precursor Journal Article uri icon

Overview

publication date

  • April 12, 2016

has restriction

  • closed

Date in CU Experts

  • May 17, 2016 6:27 AM

Full Author List

  • Lee Y; Sun H; Young MJ; George SM

author count

  • 4

citation count

  • 51

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 2022

end page

  • 2032

volume

  • 28

issue

  • 7