Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions
Journal Article
Overview
publication date
- May 1, 2016
Full Author List
- George SM; Lee Y
published in
- ACS Nano Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 4889
end page
- 4894
volume
- 10
issue
- 5