Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions Journal Article uri icon

Overview

publication date

  • May 1, 2016

Full Author List

  • George SM; Lee Y

Other Profiles

Additional Document Info

start page

  • 4889

end page

  • 4894

volume

  • 10

issue

  • 5