Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions Journal Article uri icon

Overview

publication date

  • May 1, 2016

has restriction

  • closed

Date in CU Experts

  • May 27, 2016 4:06 AM

Full Author List

  • George SM; Lee Y

author count

  • 2

citation count

  • 122

Other Profiles

International Standard Serial Number (ISSN)

  • 1936-0851

Electronic International Standard Serial Number (EISSN)

  • 1936-086X

Additional Document Info

start page

  • 4889

end page

  • 4894

volume

  • 10

issue

  • 5