Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

May 1, 2016

Full Author List

George SM; Lee Y

published in

ACS Nano Journal

Other Profiles

Digital Object Identifier (DOI)

10.1021/acsnano.6b02991

Additional Document Info

start page

4889

end page

4894

volume

10

issue

5