Multiple beam ptychography Conference Proceeding

Overview

CU Boulder Authors

• Kapteyn, Henry C
• Murnane, Margaret

publication date

• February 22, 2016

has restriction

• closed

Date in CU Experts

• July 13, 2016 2:58 AM

Full Author List

• Karl R; Bevis C; Lopez-Rios R; Reichanadter J; Gardner DF; Porter C; Shanblatt E; Tanksalvala M; Mancini GF; Murnane M

Full Editor List

• Sanchez MI; Ukraintsev VA

author count

• 12

published in

• Proceedings of SPIE  Journal

presented at event

• 30th Conference on Metrology, Inspection, and Process Control for Microlithography  Conference

Other Profiles

International Standard Serial Number (ISSN)

• 0277-786X

Electronic International Standard Serial Number (EISSN)

• 1996-756X

Digital Object Identifier (DOI)

• https://doi.org/10.1117/12.2220416

Additional Document Info

volume

• 9778