Reliable characterization of materials and nanostructured systems << 50nm using coherent EUV beams Conference Proceeding uri icon


publication date

  • February 22, 2016

Full Author List

  • Hernandez-Charpak J; Frazer T; Knobloch J; Hoogeboom-Pot K; Nardi D; Chao W; Jiang L; Tripp M; King S; Kapteyn H

Other Profiles

Additional Document Info


  • 9778