Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films Journal Article uri icon

Overview

publication date

  • August 1, 2016

Full Author List

  • Hoogeboom-Pot KM; Turgut E; Hernandez-Charpak JN; Shaw JM; Kapteyn HC; Murnane MM; Nardi D

Other Profiles

Additional Document Info

start page

  • 4773

end page

  • 4778

volume

  • 16

issue

  • 8