Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3 Journal Article uri icon

Overview

publication date

  • July 31, 2003

Full Author List

  • Elam JW; Schuisky M; Ferguson JD; George SM

Other Profiles

Additional Document Info

start page

  • 145

end page

  • 156

volume

  • 436

issue

  • 2