Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3 Journal Article uri icon

Overview

publication date

  • July 31, 2003

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:54 PM

Full Author List

  • Elam JW; Schuisky M; Ferguson JD; George SM

author count

  • 4

citation count

  • 162

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 145

end page

  • 156

volume

  • 436

issue

  • 2