Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles Journal Article uri icon

Overview

publication date

  • August 1, 2000

Date in CU Experts

  • September 3, 2013 12:55 PM

Full Author List

  • Ferguson JD; Weimer AW; George SM

author count

  • 3

citation count

  • 169

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 95

end page

  • 104

volume

  • 371

issue

  • 1-2