Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles Journal Article uri icon

Overview

publication date

  • August 1, 2000

Full Author List

  • Ferguson JD; Weimer AW; George SM

Other Profiles

Additional Document Info

start page

  • 95

end page

  • 104

volume

  • 371

issue

  • 1-2