Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3 Journal Article uri icon

Overview

publication date

  • June 24, 2002

Full Author List

  • Ferguson JD; Weimer AW; George SM

Other Profiles

Additional Document Info

start page

  • 16

end page

  • 25

volume

  • 413

issue

  • 1-2