Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3 Journal Article uri icon

Overview

publication date

  • June 24, 2002

Date in CU Experts

  • September 3, 2013 12:55 PM

Full Author List

  • Ferguson JD; Weimer AW; George SM

author count

  • 3

citation count

  • 91

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 16

end page

  • 25

volume

  • 413

issue

  • 1-2

number

  • PII S0040-6090(02)00431-5