ALD of SiO2 at room temperature using TEOS and H2O with NH3 as the catalyst Journal Article uri icon

Overview

publication date

  • January 1, 2004

Full Author List

  • Ferguson JD; Smith ER; Weimer AW; George SM

Other Profiles

Additional Document Info

start page

  • G528

end page

  • G535

volume

  • 151

issue

  • 8