ALD of SiO2 at room temperature using TEOS and H2O with NH3 as the catalyst Journal Article uri icon

Overview

publication date

  • January 1, 2004

Date in CU Experts

  • September 3, 2013 12:55 PM

Full Author List

  • Ferguson JD; Smith ER; Weimer AW; George SM

author count

  • 4

citation count

  • 123

Other Profiles

International Standard Serial Number (ISSN)

  • 0013-4651

Electronic International Standard Serial Number (EISSN)

  • 1945-7111

Additional Document Info

start page

  • G528

end page

  • G535

volume

  • 151

issue

  • 8