Selectivity in Thermal Atomic Layer Etching Using Sequential, Self Limiting Fluorination and Ligand-Exchange Reactions Journal Article uri icon

Overview

publication date

  • November 8, 2016

Full Author List

  • Lee Y; Huffman C; George SM

Other Profiles

Additional Document Info

start page

  • 7657

end page

  • 7665

volume

  • 28

issue

  • 21