Selectivity in Thermal Atomic Layer Etching Using Sequential, Self Limiting Fluorination and Ligand-Exchange Reactions Journal Article uri icon

Overview

publication date

  • November 8, 2016

has restriction

  • closed

Date in CU Experts

  • December 13, 2016 1:27 AM

Full Author List

  • Lee Y; Huffman C; George SM

author count

  • 3

citation count

  • 77

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 7657

end page

  • 7665

volume

  • 28

issue

  • 21