Atomic layer etching of suspended ultra-thin structures
Conference Proceeding
Overview
publication date
- June 5, 2016
Date in CU Experts
- December 20, 2016 9:16 AM
Full Author List
- Eigenfeld NT; Gertsch J; Skidmore G; George SM; Bright VM
author count
- 5
presented at event
Additional Document Info
start page
- 137
end page
- 140