Ptychographic Imaging with 17.5nm Spatial Resolution Employing High Harmonic Light at 13.5nm Conference Proceeding uri icon

Overview

publication date

  • June 5, 2016

Full Author List

  • Gardner DF; Mancini GF; Tanksalvala M; Shanblatt ER; Zhang X; Galloway BR; Porter CR; Karl- R; Bevis C; Murnane MM