Sub-Wavelength EUV Imaging with 12.6 nm Spatial Resolution Employing 13.5 nm High Harmonic Beams Conference Proceeding uri icon

Overview

publication date

  • July 17, 2016

Full Author List

  • Mancini G; Gardner D; Tanksalvala M; Shanblatt E; Zhang X; Galloway B; Porter C; Karl R; Bevis C; Kapteyn H

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