Coherent Diffraction Imaging of Buried Nanostructures in a Reflection Geometry with Extreme Ultraviolet Light Conference Proceeding uri icon

Overview

publication date

  • June 5, 2016

Full Author List

  • Porter CL; Shanblatt ER; Gardner DF; Mancini GF; Karl RM; Tanksalvala MD; Bevis CS; Kapteyn HC; Murnane MM; Adams DE