Coherent Diffraction Imaging of Buried Nanostructures in a Reflection Geometry with Extreme Ultraviolet Light
Conference Proceeding
Overview
publication date
- June 5, 2016
Date in CU Experts
- January 31, 2017 12:42 PM
Full Author List
- Porter CL; Shanblatt ER; Gardner DF; Mancini GF; Karl RM; Tanksalvala MD; Bevis CS; Kapteyn HC; Murnane MM; Adams DE
author count
- 10
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 2160-9020