Thermal Atomic Layer Etching of ZnO by a "Conversion-Etch" Mechanism Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum Journal Article uri icon

Overview

publication date

  • February 14, 2017

Full Author List

  • Zywotko DR; George SM

Other Profiles

Additional Document Info

start page

  • 1183

end page

  • 1191

volume

  • 29

issue

  • 3