WO3 and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms Journal Article uri icon

Overview

publication date

  • October 4, 2017

Date in CU Experts

  • September 24, 2017 10:21 AM

Full Author List

  • Johnson NR; George SM

author count

  • 2

citation count

  • 32

Other Profiles

International Standard Serial Number (ISSN)

  • 1944-8244

Electronic International Standard Serial Number (EISSN)

  • 1944-8252

Additional Document Info

start page

  • 34435

end page

  • 34447

volume

  • 9

issue

  • 39