WO3 and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms Journal Article uri icon

Overview

publication date

  • October 4, 2017

Full Author List

  • Johnson NR; George SM

Other Profiles

Additional Document Info

start page

  • 34435

end page

  • 34447

volume

  • 9

issue

  • 39