Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4 Journal Article uri icon

Overview

publication date

  • October 10, 2017

Full Author List

  • Lee Y; George SM

Other Profiles

Additional Document Info

start page

  • 8202

end page

  • 8210

volume

  • 29

issue

  • 19