Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4 Journal Article uri icon

Overview

publication date

  • October 10, 2017

has restriction

  • closed

Date in CU Experts

  • November 1, 2017 12:43 PM

Full Author List

  • Lee Y; George SM

author count

  • 2

citation count

  • 67

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 8202

end page

  • 8210

volume

  • 29

issue

  • 19