In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures Journal Article uri icon

Overview

publication date

  • October 31, 2011

Full Author List

  • Zhang Y; Yang R; George SM; Lee Y-C

Other Profiles

Additional Document Info

start page

  • 251

end page

  • 257

volume

  • 520

issue

  • 1