Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition Journal Article uri icon

Overview

publication date

  • April 2, 2009

Full Author List

  • Zhang Y; Bertrand JA; Yang R; George SM; Lee YC

Other Profiles

Additional Document Info

start page

  • 3269

end page

  • 3272

volume

  • 517

issue

  • 11