GROWTH OF SIO2 ON SI(111)7X7 USING SICL4 AND H2O Conference Proceeding

Overview

CU Boulder Authors

• George, Steven

publication date

• November 30, 1992

Date in CU Experts

• December 22, 2017 10:16 AM

Full Author List

• WISE ML; OKADA LA; COON PA; GEORGE SM

Full Editor List

• Abernathy CR; Bates CW; Bohling DA; Hobson WS

author count

• 4

citation count

• 1

presented at event

• 3RD BIENNIAL MEETING OF CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS, AT THE 1992 FALL MEETING OF THE MATERIALS RESEARCH SOC  Conference

Other Profiles

International Standard Serial Number (ISSN)

• 0886-7860

International Standard Book Number (ISBN) 10

• 1-55899-177-8

Additional Document Info

start page

• 499

end page

• 504

volume

• 282