ADSORPTION AND DECOMPOSITION OF DIETHYLSILANE ON SILICON SURFACES
Conference Proceeding
Overview
publication date
- November 26, 1990
Date in CU Experts
- December 22, 2017 10:17 AM
Full Author List
- COON PA; WISE ML; DILLON AC; ROBINSON MB; GEORGE SM
Full Editor List
- INTERRANTE LV; JENSEN KF; DUBOIS LH; GROSS ME
author count
- 5
citation count
- 8
presented at event
Other Profiles
International Standard Book Number (ISBN) 10
- 1-55899-096-8
Additional Document Info
start page
- 303
end page
- 309
volume
- 204