Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C Journal Article
Overview
publication date
- May 3, 2018
Date in CU Experts
- May 25, 2018 2:43 AM
Full Author List
- Sprenger JK; Sun H; Cavanagh AS; Roshko A; Blanchard PT; George SM
author count
- 6
citation count
- 30
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1932-7447
Digital Object Identifier (DOI)
Additional Document Info
start page
- 9455
end page
- 9464
volume
- 122
issue
- 17