Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 degrees C Journal Article uri icon

Overview

publication date

  • May 3, 2018

Full Author List

  • Sprenger JK; Sun H; Cavanagh AS; Roshko A; Blanchard PT; George SM

Other Profiles

Additional Document Info

start page

  • 9455

end page

  • 9464

volume

  • 122

issue

  • 17