Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source Conference Proceeding uri icon

Overview

publication date

  • February 26, 2018

Date in CU Experts

  • October 25, 2018 12:16 PM

Full Author List

  • Bevis CS; Karl RM; Wang B; Esashi Y; Tanksalvala M; Porter CL; Johnsen P; Adams DE; Murnane MM; Kapteyn HC

Full Editor List

  • Ukraintsev VA; Adan O

author count

  • 10

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info

volume

  • 10585