Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source Conference Proceeding uri icon


publication date

  • February 26, 2018

has restriction

  • closed

Date in CU Experts

  • October 25, 2018 12:16 PM

Full Author List

  • Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P

Full Editor List

  • Ukraintsev VA; Adan O

author count

  • 13

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info


  • 10585