Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source
Conference Proceeding
Overview
publication date
February 26, 2018
has restriction
closed
Date in CU Experts
October 25, 2018 12:16 PM
Full Author List
Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P