publication date
- February 26, 2018
Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source
Conference Proceeding
Overview
has restriction
- closed
Date in CU Experts
- October 25, 2018 12:16 PM
Full Author List
- Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P
Full Editor List
- Ukraintsev VA; Adan O
author count
- 13
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Electronic International Standard Serial Number (EISSN)
- 1996-756X
Digital Object Identifier (DOI)
Additional Document Info
volume
- 10585