Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source Conference Proceeding

Overview

CU Boulder Authors

publication date

February 26, 2018

has restriction

closed

Date in CU Experts

October 25, 2018 12:16 PM

Full Author List

Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P

Full Editor List

Ukraintsev VA; Adan O

author count

13

citation count

0

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control for Microlithography XXXII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2297464

Additional Document Info

volume

10585