Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source Conference Proceeding uri icon


publication date

  • February 26, 2018

Full Author List

  • Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P

Other Profiles

Additional Document Info


  • 10585