Complex EUV Imaging Reflectometry: Spatially-Resolved 3D Composition Determination and Dopant Profiling with a Tabletop 13nm Source
Conference Proceeding
Overview
publication date
- February 26, 2018
Full Author List
- Porter CL; Tanksalvala M; Gerrity M; Miley GP; Esashi Y; Horiguchi N; Zhang X; Bevis CS; Karl R; Johnsen P
published in
- Proceedings of SPIE Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 10585