In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition Journal Article uri icon

Overview

publication date

  • July 1, 2013

Date in CU Experts

  • December 18, 2018 4:31 AM

Full Author List

  • Geidel M; Junige M; Albert M; Bartha JW

author count

  • 4

citation count

  • 14

Other Profiles

International Standard Serial Number (ISSN)

  • 0167-9317

Electronic International Standard Serial Number (EISSN)

  • 1873-5568

Additional Document Info

start page

  • 151

end page

  • 155

volume

  • 107