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Junige, Marcel

Professional Research Asst


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research overview

  • Marcel is a Semiconductor Research Corporation (SRC) Research Scholar and Professional Research Assistant at CU Boulder in the research group of Steven M. George. He currently works on SRC project 3083: 'Gas Phase Methods for Selective Thermal Atomic Layer Etching of Si-Based Materials' with industry liaisons from Intel, Tokyo Electron (TEL), ASM, and IBM. From 2019–2021, he worked on SRC project 2871: 'Area-Selective Deposition of Organic Films using Molecular Layer Deposition and Molecular Layer Etching' with industry liaisons from Intel, TEL, IBM, and ASM.


  • Ångström-Level Processing, Atomic Layer Etching, Atomic Layer Deposition, Area-Selective Deposition, Molecular Layer Deposition; In Situ Metrology, Spectroscopic Ellipsometry; Photo-Electron Spectroscopy, Scanning Probe Microscopy, Quadrupol Mass Spectrometry, X-Ray Diffraction, X-Ray Reflectometry, Raman Spectroscopy, Grazing-Incidence Wide-Angle X-Ray Scattering; Thin Films; Vacuum Technology


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