Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties Journal Article uri icon

Overview

publication date

  • January 1, 2012

has restriction

  • closed

Date in CU Experts

  • December 18, 2018 4:31 AM

Full Author List

  • Wojcik H; Junige M; Bartha W; Albert M; Neumann V; Merkel U; Peeva A; Gluch J; Menzel S; Munnik F

author count

  • 18

citation count

  • 16

Other Profiles

International Standard Serial Number (ISSN)

  • 0013-4651

Electronic International Standard Serial Number (EISSN)

  • 1945-7111

Additional Document Info

start page

  • H166

end page

  • H176

volume

  • 159

issue

  • 2