Thermal Atomic Layer Etching of Silicon Using O-2, HF, and Al(CH3)(3) as the Reactants Journal Article uri icon

Overview

publication date

  • December 11, 2018

Full Author List

  • Abdulagatov AI; George SM

Other Profiles

Additional Document Info

start page

  • 8465

end page

  • 8475

volume

  • 30

issue

  • 23