A Tabletop Coherent EUV Source for Commercial EUVL Metrology and Imaging Applications Conference Proceeding

Overview

CU Boulder Authors

Kapteyn, Henry C

publication date

February 26, 2018

has restriction

closed

Date in CU Experts

January 3, 2019 12:17 PM

Full Author List

Zhang X; Garlick J; Mountfort E; Kapteyn H

Full Editor List

Goldberg KA

author count

4

published in

Proceedings of SPIE Journal

presented at event

Conference on Extreme Ultraviolet (EUV) Lithography IX Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2297507

Additional Document Info

volume

10583