High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • June 1, 2018

has restriction

  • closed

Date in CU Experts

  • April 17, 2019 3:59 AM

Full Author List

  • Khan SA; Suyatin DB; Sundqvist J; Graczyk M; Junige M; Kauppinen C; Kvennefors A; Huffman M; Maximov I

author count

  • 9

citation count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 2574-0970

Additional Document Info

start page

  • 2476

end page

  • 2482

volume

  • 1

issue

  • 6