Atomic layer deposition of high-kappa dielectrics on nitrided silicon surfaces Journal Article uri icon

Overview

publication date

  • May 9, 2005

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Xu Y; Musgrave CB

author count

  • 2

citation count

  • 14

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

volume

  • 86

issue

  • 19

number

  • ARTN 192110