Atomic layer deposition of hafnium nitrides using ammonia and alkylamide precursors Journal Article uri icon

Overview

publication date

  • May 27, 2005

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Xu Y; Musgrave CB

author count

  • 2

citation count

  • 9

Other Profiles

International Standard Serial Number (ISSN)

  • 0009-2614

Electronic International Standard Serial Number (EISSN)

  • 1873-4448

Additional Document Info

start page

  • 272

end page

  • 275

volume

  • 407

issue

  • 4-6