A quantum chemical study of the atomic layer deposition of Al2O3 using AlCl3 and H2O as precursors Journal Article uri icon

Overview

publication date

  • May 6, 2004

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Heyman A; Musgrave CB

author count

  • 2

citation count

  • 52

Other Profiles

International Standard Serial Number (ISSN)

  • 1520-6106

Additional Document Info

start page

  • 5718

end page

  • 5725

volume

  • 108

issue

  • 18