A quantum chemical study of the atomic layer deposition of Al2O3 using AlCl3 and H2O as precursors Journal Article uri icon

Overview

publication date

  • May 6, 2004

Full Author List

  • Heyman A; Musgrave CB

Other Profiles

Additional Document Info

start page

  • 5718

end page

  • 5725

volume

  • 108

issue

  • 18