A DFT study of the Al2O3 atomic layer deposition on SAMs: Effect of SAM termination Journal Article uri icon

Overview

publication date

  • February 24, 2004

Full Author List

  • Xu Y; Musgrave CB

Other Profiles

Additional Document Info

start page

  • 646

end page

  • 653

volume

  • 16

issue

  • 4