A DFT study of the Al2O3 atomic layer deposition on SAMs: Effect of SAM termination Journal Article uri icon

Overview

publication date

  • February 24, 2004

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Xu Y; Musgrave CB

author count

  • 2

citation count

  • 73

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 646

end page

  • 653

volume

  • 16

issue

  • 4