Quantum chemical study of the elementary reactions in zirconium oxide atomic layer deposition uri icon

Overview

publication date

  • July 8, 2002

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Widjaja Y; Musgrave CB

author count

  • 2

citation count

  • 55

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

start page

  • 304

end page

  • 306

volume

  • 81

issue

  • 2