The role of ammonia in atomic layer deposition of tungsten nitride Journal Article uri icon

Overview

publication date

  • April 23, 2007

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Mukhopadhyay AB; Musgrave CB

author count

  • 2

citation count

  • 13

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

volume

  • 90

issue

  • 17

number

  • ARTN 173120