DFT study of the adsorption of chlorosilanes on the Si(100)-2 x 1 surface Journal Article uri icon

Overview

publication date

  • December 6, 2001

Full Author List

  • Hall MA; Mui C; Musgrave CB

Other Profiles

Additional Document Info

start page

  • 12068

end page

  • 12075

volume

  • 105

issue

  • 48