Non-growth ligand exchange reactions in atomic layer deposition of HfO2 Journal Article uri icon

Overview

publication date

  • April 3, 2006

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Mukhopadhyay AB; Musgrave CB

author count

  • 2

citation count

  • 18

Other Profiles

International Standard Serial Number (ISSN)

  • 0009-2614

Electronic International Standard Serial Number (EISSN)

  • 1873-4448

Additional Document Info

start page

  • 215

end page

  • 220

volume

  • 421

issue

  • 1-3