Kinetics and thermodynamics of atomic layer deposition (ALD) of high-K dielectrics using alternative metallorganic precursors. Conference Proceeding uri icon

Overview

publication date

  • September 7, 2003

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Musgrave CB; Han JH; Gordon RG

author count

  • 3

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • U386

end page

  • U386

volume

  • 226