Kinetics and thermodynamics of atomic layer deposition (ALD) of high-K dielectrics using alternative metallorganic precursors. Conference Proceeding uri icon

Overview

publication date

  • September 7, 2003

Full Author List

  • Musgrave CB; Han JH; Gordon RG

Additional Document Info

start page

  • U386

end page

  • U386

volume

  • 226