A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface Journal Article uri icon

Overview

publication date

  • February 10, 2004

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Han JH; Gao GL; Widjaja Y; Garfunkel E; Musgrave CB

author count

  • 5

citation count

  • 42

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Electronic International Standard Serial Number (EISSN)

  • 1879-2758

Additional Document Info

start page

  • 199

end page

  • 212

volume

  • 550

issue

  • 1-3