A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface Journal Article uri icon

Overview

publication date

  • February 10, 2004

Full Author List

  • Han JH; Gao GL; Widjaja Y; Garfunkel E; Musgrave CB

Other Profiles

Additional Document Info

start page

  • 199

end page

  • 212

volume

  • 550

issue

  • 1-3