Quantum chemical study of the mechanism of aluminum oxide atomic layer deposition Journal Article uri icon

Overview

publication date

  • May 6, 2002

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Widjaja Y; Musgrave CB

author count

  • 2

citation count

  • 155

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

start page

  • 3304

end page

  • 3306

volume

  • 80

issue

  • 18