Surface reaction mechanisms for atomic layer deposition of silicon nitride Journal Article uri icon

Overview

publication date

  • May 20, 2004

Full Author List

  • Mui C; Widjaja Y; Kang JK; Musgrave CB

Other Profiles

Additional Document Info

start page

  • 159

end page

  • 170

volume

  • 557

issue

  • 1-3