Surface reaction mechanisms for atomic layer deposition of silicon nitride Journal Article uri icon

Overview

publication date

  • May 20, 2004

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Mui C; Widjaja Y; Kang JK; Musgrave CB

author count

  • 4

citation count

  • 29

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Electronic International Standard Serial Number (EISSN)

  • 1879-2758

Additional Document Info

start page

  • 159

end page

  • 170

volume

  • 557

issue

  • 1-3