Effect of HF Pressure on Thermal Al2O3 Atomic Layer Etch Rates and Al2O3 Fluorination Journal Article uri icon

Overview

publication date

  • April 25, 2019

has restriction

  • closed

Date in CU Experts

  • June 4, 2019 1:57 AM

Full Author List

  • Cano AM; Marquardt AE; DuMont JW; George SM

author count

  • 4

citation count

  • 60

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 10346

end page

  • 10355

volume

  • 123

issue

  • 16