Effect of HF Pressure on Thermal Al2O3 Atomic Layer Etch Rates and Al2O3 Fluorination Journal Article uri icon

Overview

publication date

  • April 25, 2019

Full Author List

  • Cano AM; Marquardt AE; DuMont JW; George SM

Other Profiles

Additional Document Info

start page

  • 10346

end page

  • 10355

volume

  • 123

issue

  • 16