SF₄ as the Fluorination Reactant for Al₂O₃ and VO₂ Thermal Atomic Layer Etching Journal Article

Overview

CU Boulder Authors

publication date

May 28, 2019

has restriction

closed

Date in CU Experts

June 18, 2019 4:39 AM

Full Author List

Gertsch JC; Cano AM; Bright VM; George SM

author count

4

citation count

23

published in

Chemistry of Materials Journal

Other Profiles

International Standard Serial Number (ISSN)

0897-4756

Electronic International Standard Serial Number (EISSN)

1520-5002

Digital Object Identifier (DOI)

https://doi.org/10.1021/acs.chemmater.8b05294

Additional Document Info

start page

3624

end page

3635

volume

31

issue

10