SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

May 28, 2019

Full Author List

Gertsch JC; Cano AM; Bright VM; George SM

published in

Chemistry of Materials Journal

Other Profiles

Digital Object Identifier (DOI)

10.1021/acs.chemmater.8b05294

Additional Document Info

start page

3624

end page

3635

volume

31

issue

10