SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching
Journal Article
Overview
publication date
- May 28, 2019
Full Author List
- Gertsch JC; Cano AM; Bright VM; George SM
published in
- Chemistry of Materials Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 3624
end page
- 3635
volume
- 31
issue
- 10