SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • May 28, 2019

has restriction

  • closed

Date in CU Experts

  • June 18, 2019 4:39 AM

Full Author List

  • Gertsch JC; Cano AM; Bright VM; George SM

author count

  • 4

citation count

  • 23

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 3624

end page

  • 3635

volume

  • 31

issue

  • 10