SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching Journal Article

Overview

CU Boulder Authors

publication date

May 28, 2019

Full Author List

Gertsch JC; Cano AM; Bright VM; George SM

published in

Chemistry of Materials Journal

Other Profiles

Digital Object Identifier (DOI)

10.1021/acs.chemmater.8b05294

Additional Document Info

start page

3624

end page

3635

volume

31

issue

10