Surface chemistry of thermal atomic layer etching Conference Proceeding

Overview

CU Boulder Authors

• George, Steven

publication date

• March 18, 2018

Date in CU Experts

• June 18, 2019 4:39 AM

Full Author List

• George S

author count

• 1

published in

• ACS National Meeting Book of Abstracts  Journal

presented at event

• 255th National Meeting and Exposition of the American-Chemical-Society (ACS) - Nexus of Food, Energy, and Water  Conference

Other Profiles

International Standard Serial Number (ISSN)

• 0065-7727

Additional Document Info

volume

• 255