Atomic Layer Etching (ALE) using sequential thermal reactions: Atomic Layer Deposition (ALD) in reverse Conference Proceeding

Overview

CU Boulder Authors

George, Steven

publication date

April 2, 2017

Date in CU Experts

June 18, 2019 4:39 AM

Full Author List

George S; Lee Y; DuMont J; Johnson N; Zywotko D

author count

5

published in

ACS National Meeting Book of Abstracts Journal

presented at event

253rd National Meeting of the American-Chemical-Society (ACS) on Advanced Materials, Technologies, Systems, and Processes Conference

Other Profiles

International Standard Serial Number (ISSN)

0065-7727

Additional Document Info

volume

253