Thermal atomic layer etching of crystalline GaN using sequential exposures of XeF2 and BCl3 Journal Article uri icon

Overview

publication date

  • June 17, 2019

has restriction

  • closed

Date in CU Experts

  • July 16, 2019 2:28 AM

Full Author List

  • Johnson NR; Hite JK; Mastro MA; Eddy CR; George SM

author count

  • 5

citation count

  • 23

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

volume

  • 114

issue

  • 24

number

  • ARTN 243103